DRK8090 Umwirondoro wamafoto

Iki gikoresho gikoresha uburyo budahuye, optique ya fonctionnement ya interterometrike yo gupima, ntabwo yangiza ubuso bwakazi mugihe cyo gupima, irashobora gupima byihuse ibishushanyo-bitatu-bishushanyo mbonera bya micro-topografiya yibikorwa bitandukanye, ikanasesengura no kubara ibipimo. ibisubizo.

Ibisobanuro ku bicuruzwa
Ibiranga: Birakwiriye gupima ubuso bwubuso bwibice bitandukanye bipima nibice bya optique; ubujyakuzimu bwa reticle yumutegetsi na terefone; ubunini bwikibiriti cyububiko bwa grating groove nuburyo imiterere morphologie yumupaka; ubuso bwa disiki ya magnetiki (optique) n'umutwe wa magneti Umutwe gupima; silicon wafer yubuso bukabije nuburyo bwo gupima imiterere, nibindi.
Bitewe nuburinganire buhanitse bwibikoresho, bufite ibiranga kutabonana no gupima ibipimo bitatu, kandi bigakoresha igenzura rya mudasobwa hamwe nisesengura ryihuse no kubara ibisubizo byapimwe. Iki gikoresho gikwiranye ninzego zose zipima no gupima ibipimo byubushakashatsi, ibyumba byo gupima inganda n’amabuye y'agaciro, amahugurwa atunganyirizwa neza, kandi biranakwiriye Ibigo by'Amashuri Makuru n'ibigo by'ubushakashatsi bwa siyansi, n'ibindi.
Ibyingenzi byingenzi bya tekiniki
Gupima urwego rwa microscopique yuburebure bwimbitse
Ku buso bukomeza, iyo nta burebure butunguranye impinduka zirenze 1/4 cyumurambararo hagati ya pigiseli ebyiri zegeranye: 1000-1nm
Iyo hari uburebure bwa mutation burenze 1/4 cyuburebure hagati ya pigiseli ebyiri zegeranye: 130-1nm
Gusubiramo ibipimo: δRa ≤0.5nm
Intego yo gukuza intego: 40X
Ububiko butandukanye: Φ 65
Intera y'akazi: 0.5mm
Umwanya wibikoresho byo kureba Biboneka: Φ0.25mm
Ifoto: 0.13 × 0.13mm
Gukuza ibikoresho Biboneka: 500 ×
Ifoto (irebwa na ecran ya mudasobwa) -2500 ×
Kwakira ibipimo byo kwakira: 1000X1000
Ingano ya Pixel: 5.2 × 5.2µm
Igihe cyo gupima icyitegererezo (scanning) igihe: 1S
Ibikoresho bisanzwe byerekana indorerwamo (hejuru): ～ 50%
Ibitekerezo (hasi): ～ 4%
Inkomoko yumucyo: itara ryaka 6V 5W
Icyatsi kibangamira akayunguruzo k'uburebure: λ ≒ 530nm
Igice cy'ubugari λ ≒ 10nm
Kuzamura microscope nyamukuru: mm 110
Kuzamura ameza: 5 mm
Urwego rwo kugenda muri X na Y icyerekezo: mm 10 mm
Urwego ruzunguruka rwakazi: 360 °
Urwego ruringaniye kumeza yakazi: ± 6 °
Sisitemu ya mudasobwa: P4, 2.8G cyangwa irenga, 17-inimero ya ecran-ecran hamwe na 1G cyangwa ububiko bwinshi